Evidence for the layered structure of c-BN films by in situ REELS analyses and depth profiling

Applied Surface Science

Volumn 152, Issue 1, 1999, Pages 70-76

  Ilias, S ^b   Stambouli, V ^a   Bouchier, D ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

^b UNIVERSITÉ DE MONTRÉAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; CRYSTAL GROWTH; ELECTRON ENERGY LEVELS; ELECTRON ENERGY LOSS SPECTROSCOPY; ETCHING; FILM GROWTH; ION BEAMS; POLYCRYSTALLINE MATERIALS;

DEPTH PROFILING;

CUBIC BORON NITRIDE;

EID: 0033343449     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00304-9     Document Type: Article

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