First harmonic (2f) characterisation of resonant frequency and Q-factor of micromechanical transducers

Analog Integrated Circuits and Signal Processing

Volumn 37, Issue 1, 2003, Pages 17-33

  Logeeswaran, V J ^a   Tay, F E H ^a   Chan, M L ^a   Chau, F S ^a   Liang, Y C ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Electrostatic drive; Experimental modal analysis; First harmonic (2f); Lock in technique; Lorentzian curve fitting; Resonance curve area (RCA)

Indexed keywords

BANDWIDTH; CROSSTALK; CURVE FITTING; MICROELECTROMECHANICAL DEVICES; MODAL ANALYSIS; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT; SIGNAL TO NOISE RATIO;

FIRST HARMONIC COMPONENT; HALF-POWER BANDWIDTH METHOD; LORENTZIAN CURVE-FIT; NYQUIST PLOT; RESONANCE CURVE AREA METHOD;

TRANSDUCERS;

EID: 0042739470     PISSN: 09251030     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1024816600152     Document Type: Article

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