A single-crystal Si-resonator with on-chip readout amplifier in standard CMOS

Sensors and Actuators, A: Physical

Volumn 93, Issue 2, 2001, Pages 163-172

  Bertz, A ^a   Symanzik, H ^a   Steiniger, C ^a   Hoffer A ^a   Griesbach, K ^b   Stegemann, K ^b   Ebest, G ^a   Gessner, T ^a,c  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b Zentrum Mikroelektronik Dresden GmbH   (Germany)

^c Fraunhofer Institute Reliability and Microintegration   (Germany)

Author keywords

CMOS; Micromachining; Monolithic integration; Oscillator; Resonator; Single crystal silicon

Indexed keywords

ANNEALING; CMOS INTEGRATED CIRCUITS; MICROMACHINING; RESONATORS; SEMICONDUCTING SILICON; SINGLE CRYSTALS;

MONOLITHIC INTEGRATION; PARASITIC EFFECTS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035975540     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00650-1     Document Type: Article

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