Verification of 2-D MEMS model using optical profiling techniques

Optics and Lasers in Engineering

Volumn 36, Issue 2, 2001, Pages 169-183

  Hill, M ^a   O'Mahony, C ^a   Berney, H ^a   Hughes, P J ^a   Hynes, E ^b   Lane, W A ^a  

^a UNIVERSITY COLLEGE CORK   (Ireland)

^b ANALOG DEVICES   (Ireland)

Author keywords

Electrostatic pull in; Finite difference model; Interferometry; Micromechanical devices; Pressure membrane

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC FIELDS; ELECTROSTATICS; FINITE DIFFERENCE METHOD; INTERFEROMETRY; SCANNING; SENSORS; STRESS ANALYSIS;

MICROMECHANICAL ELEMENTS; PRESSURE MEMBRANES;

MICROELECTROMECHANICAL DEVICES;

EID: 0035423957     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(01)00036-7     Document Type: Article

References (14)

1. Measurement capabilities of optical 3D-sensors for MST applications