Design and fabrication of a micromachined resonant gyroscope

International Journal of Electronics

Volumn 86, Issue 10, 1999, Pages 1179-1191

  Tay, Francis E H ^a   Liang, Yung C ^a   Logeeswaran, V J ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; DESIGN; ETCHING; FABRICATION; GEOMETRY; PERMITTIVITY; PHASE SHIFT;

CAPACITIVE SENSING; RESONANT GYROSCOPES;

GYROSCOPES;

EID: 0033343621     PISSN: 00207217     EISSN: 13623060     Source Type: Journal    
DOI: 10.1080/002072199132734     Document Type: Article

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