Characterization of a multilayer highly reflecting mirror by spectroscopic phase-modulated ellipsometry

Applied Optics

Volumn 40, Issue 10, 2001, Pages 1707-1714

  Bhattacharyya, Dibyendu ^a   Sahoo, Naba K ^a   Thakur, Sudhakar ^a   Das, Nimai C ^a  

^a BHABHA ATOMIC RESEARCH CENTRE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; OPTICAL MULTILAYERS; PHASE MODULATION; REFRACTIVE INDEX; SPECTROSCOPIC ANALYSIS; THIN FILMS;

SPECTRSOCOPIC ELLIPSOMETRY;

MIRRORS;

EID: 0038300677     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.40.001707     Document Type: Article

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