Micro-stereolithography for MEMS

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 66, Issue , 1998, Pages 3-9

  Zhang, X ^a   Jiang, X N ^a   Sun, C ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC PRODUCTS; COMPUTER AIDED DESIGN; COMPUTER CONTROL; GAS LASERS; GEARS; PHOTOLITHOGRAPHY; SILICON WAFERS;

MICROSTEREOLITHOGRAPHY;

MICROELECTROMECHANICAL DEVICES;

EID: 0032293829     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)