Manufacturing of three-dimensional micro-parts by UV laser induced polymerization

Journal of Micromechanics and Microengineering

Volumn 6, Issue 2, 1996, Pages 240-253

  Nakamoto, Takeshi ^a   Yamaguchi, Katsumi ^a   Abraha, Petros A ^a   Mishima, Kunihiro ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LASER BEAM EFFECTS; LIGHT ABSORPTION; MICROELECTROMECHANICAL DEVICES; POLYMERIZATION; POLYMERS; SOLIDIFICATION; THREE DIMENSIONAL;

ABSORPTION COEFFICIENT; FOCAL LENGTH; HIGH ASPECT MICROPARTS; LASER INDUCED POLYMERIZATION; LIQUID PHOTOPOLYMERS; PRODUCT SHAPE; THREE DIMENSIONAL MICROPARTS; WRITING SPEED;

MICROELECTRONIC PROCESSING;

EID: 0030156482     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/2/006     Document Type: Article

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