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Volumn 417, Issue 6891, 2002, Pages 802-803
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Semiconductor technology: Imprints offer Moore
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Author keywords
[No Author keywords available]
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Indexed keywords
COSTS;
MICROPROCESSOR CHIPS;
PHOTOLITHOGRAPHY;
PRINTING;
IMPRINTING TECHNIQUES;
SEMICONDUCTOR MATERIALS;
SILICON;
SEMICONDUCTOR INDUSTRY;
LASER;
PRIORITY JOURNAL;
SEMICONDUCTOR;
SHORT SURVEY;
ULTRAVIOLET RADIATION;
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EID: 0037142025
PISSN: 00280836
EISSN: None
Source Type: Journal
DOI: 10.1038/417802a Document Type: Short Survey |
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Times cited : (31)
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References (6)
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