Ultrathin diblock copolymer/titanium laminates - A tool for nanolithography

Advanced Materials

Volumn 10, Issue 11, 1998, Pages 849-852

  Spatz, Joachim P ^a   Eibeck, Peter ^a   Mößmer, Stefan ^a   Möller, Martin ^a   Herzog, Thomas ^a   Ziemann, Paul ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BLOCK COPOLYMERS; DEPOSITION; ETCHING; EVAPORATION; MICA; NANOTECHNOLOGY; POLYSTYRENES; SURFACE STRUCTURE; TITANIUM; ULTRATHIN FILMS; VINYL RESINS; WETTING;

POLYVINYL PYRIDINE;

PLASTIC FILMS;

EID: 0032479697     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-4095(199808)10:11<849::AID-ADMA849>3.0.CO;2-5     Document Type: Article

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