Effect of nonstoichiometry upon optical properties of radio frequency sputtered Al-N thin films formed at various sputtering pressures

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 6, 1996, Pages 3092-3099

  Wang, Dao Yuan ^a   Nagahata, Yukio ^a   Masuda, Masataka ^a   Hayashi, Yasunori ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030505093     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580177     Document Type: Article

References (24)

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