The influence of argon pressure on the structure of sputtered molybdenum: From porous amorphous to a new type of highly textured film

Journal of Applied Physics

Volumn 80, Issue 11, 1996, Pages 6266-6273

  Klabunde, F ^a   Lohmann M ^a   Blasing J ^a   Drusedau T ^a  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000028360     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363702     Document Type: Article

References (19)

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