Measurements of relative BCl density in BCl3-containing inductively coupled radio frequency plasmas

Journal of Applied Physics

Volumn 83, Issue 8, 1998, Pages 4030-4036

  Fleddermann, C B ^a,b   Hebner, G A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b University of NewMexico   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042055431     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367158     Document Type: Article

References (15)

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14. This has been observed by numerous authors, for example, C. Schaffnit, L. Thomas, F. Rossi, R. Hugon, and Y. Pauleau, Surf. Coat. Technol. 87-8, 402 (1996); H. Saitoh, J. Sahtoh, T. Ishiguro, K. Kamata, and Y. Ichinose, J. Jpn. Inst. Metals 60, 476 (1996).
15. This has been observed by numerous authors, for example, C. Schaffnit, L. Thomas, F. Rossi, R. Hugon, and Y. Pauleau, Surf. Coat. Technol. 87-8, 402 (1996); H. Saitoh, J. Sahtoh, T. Ishiguro, K. Kamata, and Y. Ichinose, J. Jpn. Inst. Metals 60, 476 (1996).