Improvement in the electrical properties in Pt/Pb(Zr0.52Ti0.48)O3/Pt ferroelectric capacitors using a wet cleaning method

Journal of Applied Physics

Volumn 86, Issue 11, 1999, Pages 6376-6381

  Lee, June Key ^a   Park, Youngsoo ^a   Chung, Ilsub ^a   Oh, Sang Jeong ^b   Jung, Dong Jin ^b   Song, Yoon Jong ^b   Koo, Bon Jae ^b   Lee, Sung Yung ^b   Kim, Kinam ^b   Desu, Seshu B ^c,d  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b SAMSUNG Electronics   (South Korea)

^c VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

^d University of Massachusetts   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041692487     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371700     Document Type: Article

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