Process and properties of Pt/Pb(Zr,Ti)O3/Pt integrated ferroelectric capacitors

Integrated Ferroelectrics

Volumn 16, Issue 1-4, 1997, Pages 21-28

  Torii, K ^a   Kawakami, H ^a   Miki, H ^a   Kushida, K ^a   Itoga, T ^a   Goto, Y ^a   Kumihashi, T ^a   Yokoyama, N ^a   Moniwa, M ^a   Shoji, K ^a   Kaga, T ^a   Fujisaki, Y ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DATA STORAGE EQUIPMENT; DRY ETCHING; FERROELECTRIC DEVICES; LEAD COMPOUNDS; LEAKAGE CURRENTS; MASKS; PLASMA APPLICATIONS; PLATINUM;

FERROELECTRIC CAPACITORS;

CAPACITORS;

EID: 0031377371     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708013026     Document Type: Article

References (9)

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6. T. Kumihashi et al, JJAP letter, (to be published)
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9. K. Torii et al., 1995 Symp. on VLSI Tech. Digest of Tech. Papers, p.125 (1995)