Crystal Surface Defects and Oxygen Gettering in Thermally Oxidized Bonded SOI Wafers

Journal of the Electrochemical Society

Volumn 148, Issue 2, 2001, Pages

  Papakonstantinou, P ^a   Somasundram, K ^b   Cao, X ^b   Nevin, W A ^b  

^a UNIVERSITY OF ULSTER   (United Kingdom)

^b Analog Devices Inc UK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041655665     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1337608     Document Type: Article

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