Oxygen gettering and precipitation at MeV Si+ ion implantation induced damage in silicon

Applied Physics Letters

Volumn 69, Issue 25, 1996, Pages 3899-3901

  Agarwal, Aditya ^a   Christensen, K ^a   Venables, D ^a   Maher, D M ^a   Rozgonyi, G A ^a  

^a North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000268095     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117563     Document Type: Article

References (13)

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