Ion projection direct-structuring for nanotechnology applications

Materials Research Society Symposium - Proceedings

Volumn 739, Issue , 2002, Pages 3-12

  Loeschner, Hans ^a   Fantner, Ernest J ^a   Korntner, Regina ^a   Platzgummer, Elmar ^a   Stengl, Gerhard ^a   Zeininger, Michaela ^a   Baglin, J E E ^b   Berger, Ruediger ^c   Brünger, Wilhelm H ^d   Dietzel, Andreas ^c   Baraton, Marie Isabelle ^e,f   Merhari, Lhadi ^f  

^a IMS NANOFABRICATION AG   (Austria)

^b IBM ALMADEN RESEARCH CENTER   (United States)

^c IBM   (Germany)

^d FRAUNHOFER INSTITUTE FOR SILICON TECHNOLOGY ISIT   (Germany)

^e UNIVERSITY OF LIMOGES   (France)

^f CERAMEC   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; OPTICAL SYSTEMS; PROJECTION SYSTEMS;

LARGE-FIELD ION-OPTICS;

ION BEAMS;

EID: 0041620435     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-739-h1.3     Document Type: Conference Paper

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