An uncooled microbolometer infrared detector based on poly-SiGe thermistor

Sensors and Actuators, A: Physical

Volumn 105, Issue 3, 2003, Pages 286-292

  Dong, Liang ^a   Yue, Ruifeng ^a   Liu, Litian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Infrared; Microbolometer; Poly SiGe; UHV CVD

Indexed keywords

ANNEALING; BOLOMETERS; CHEMICAL VAPOR DEPOSITION; ETCHING; INDUCTIVELY COUPLED PLASMA; INFRARED DETECTORS; POLYCRYSTALLINE MATERIALS; RAMAN SPECTROSCOPY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON COMPOUNDS; THERMAL CONDUCTIVITY; ULTRAHIGH VACUUM;

MICROBOLOMETERS;

THERMISTORS;

EID: 0041512982     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00232-2     Document Type: Article

References (15)

1. R.A. Wood, Uncooled thermal imaging with monolithic silicon focal arrays, Proc. SPIE 2020 (1993) 322-329.
2. T. Ishikawa, M. Ueno, K. Endo, Y. Nakaki, H. Hata, T. Sons, M. Kimata, T. Ozeki, Low-cost 320 × 240 uncooled IRFPA using conventional silicon IC process, Proc. SPIE 3698 (1999) 556-564.
3. x:H thermistor bolometer based on micro-machined structure, in: Proceedings of the Ninth International Conference on Solid-State Sensors and Actuators, Transducers'97, Chicago, IL, USA, 16-19 June 1997, pp. 1253-1256.
4. J.L. Tissot, F. Rothan, C. Vedel, M. Vilain, J.J. Yon, LETI/LIR's uncooled microbolometer development, Proc. SPIE 3379 (1998) 139-144.
5. T.J. King, J.P. McVittie, K.C. Saraswat, J.R. Pfiester, Electrical properties of heavily doped polycrystalline silicon-germanium films, IEEE Trans. Electr. Devices 41 (2) (1994) 228-232.
6. 30% for thermopiles, Sens. Actuators, A 53 (1996) 325-329.
7. S. Sedky, P. Fiorini, M. Caymax, A. Verbist, C. Baert, IR bolometers made of polycrystalline silicon germanium, Sens. Actuators, A 66 (1998) 193-199.
8. D.D.L. Wijngaards, S.H. Kong, M. Bartek, R.F. Wolffenbuttel, Design and fabrication of on-chip integrated polySiGe and polySi Peltier devices, Sens. Actuators, A 85 (2000) 316-323.
9. M. Strasser, R. Aigner, M. Franosch, G. Wachutka, Miniaturized thermoelectric generators based on poly-Si and poly-SiGe surface micromachining, Sens. Actuators, A 97-98 (2002) 535-542.
10. K.C. Liddiard, Thin-film resistance bolometer IR detectors, Infrared Phys. 24 (1) (1984) 57-64.
11. M. Almasri, D.P. Butler, Z.C. Butler, Self-supporting uncooled infrared microbolometers with low-thermal mass, J. Microelectromech. Syst. 10 (3) (2001) 469-476.
12. D. Rossberg, Optical properties of the integrated infrared sensor, in: Proceedings of the Eighth International Conference on Solid-State Sensors and Actuators, Transducers'95, Stockholm, Sweden, 25-29 June 1995, pp. 652-655.
13. T. Akin, Z. Olgun, O. Akar, H. Kulah, An integrated thermopile structure with high responsivity using any standard CMOS process, Sens. Actuators, A 33 (1998) 218-224.
14. J.S. Shie, P.K. Weng, Design considerations of metal-film bolometer with micromachined floating membrane, Sens. Actuators, A 33 (1992) 182-189.
15. T. Schimert, D. Ratcliff, J. Brady, S. Ropson, R. Gooch, B. Ritchey, P. McCardel, K. Rachels, M. Wand, M. Weinstein, J. Wynn, Low cost, low power uncooled a-Si-based micro infrared camera for unattended ground sensor applications, Proc. SPIE 3713 (1999) 101-111.