Spectroscopic ellipsometry studies on BN films from IR to vacuum UV energy region

Diamond and Related Materials

Volumn 11, Issue 3-6, 2002, Pages 1281-1285

  Panayiotatos, Y ^a   Logothetidis, S ^a   Laskarakis, A ^a   Zervopoulou, A ^a   Gioti, M ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

Boron nitride; Ellipsometry; Modeling; VUV ellipsometry

Indexed keywords

ELLIPSOMETRY; FOURIER TRANSFORMS; INFRARED RADIATION; MAGNETRON SPUTTERING; SPECTROSCOPIC ANALYSIS; ULTRAVIOLET RADIATION;

BONDING CONFIGURATIONS;

BORON COMPOUNDS;

BORON NITRIDE; MECHANICAL PROPERTY; MODELING; SPECTROSCOPY; ULTRAVIOLET RADIATION;

ABSORPTION; AMORPHOUS SUBSTANCE; DIELECTRIC CONSTANT; ELLIPSOMETRY; ENERGY; MAGNETRON SPUTTERING; MATHEMATICAL ANALYSIS; MODEL; OSCILLATOR; SPUTTERING (PHYSICS); SYNCHROTRON RADIATION;

EID: 0036508333     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00538-6     Document Type: Article

References (17)