Mechanical performance and growth characteristics of boron nitride films with respect to their optical, compositional properties and density

Surface and Coatings Technology

Volumn 151-152, Issue , 2002, Pages 155-159

  Panayiotatos, Y ^a   Patsalas, P ^a   Charitidis, C ^a   Logothetidis, S ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

Boron nitride; Density; Magnetron sputtering; Nanoindentation; Spectroscopic ellipsometry; X ray reflectivity

Indexed keywords

ARGON; BORON COMPOUNDS; INDENTATION; ION BOMBARDMENT; MAGNETRON SPUTTERING; PARTIAL PRESSURE; REFRACTIVE INDEX; SEMICONDUCTING SILICON; STRESSES; SURFACE ROUGHNESS; X RAY ANALYSIS;

X RAY REFLECTIVITY;

FILM GROWTH;

BORON NITRIDE; CHEMICAL COMPOSITION; DENSITY; INORGANIC COATING; MECHANICAL PROPERTY; OPTICAL FEATURE;

EID: 0036495999     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01624-3     Document Type: Article

References (20)