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International Journal of Modern Physics B

Volumn 14, Issue 2-3, 2000, Pages 113-124

Sputtered amorphous carbon films: Micro-structure, density, optical and mechanical properties

(1) Logothetidis, S a

a ARISTOTLE UNIVERSITY OF THESSALONIKI (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON;

CONFERENCE PAPER; DENSITY; ELASTICITY; FILM; HARDNESS; MODEL; OPTICS; SPECTROSCOPY; STRUCTURE ANALYSIS;

EID: 0034731806 PISSN: 02179792 EISSN: None Source Type: Journal
DOI: 10.1142/s0217979200000121 Document Type: Conference Paper

Times cited : (6)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.