Real-time monitoring, growth kinetics and properties of carbon based materials deposited by sputtering

Diamond and Related Materials

Volumn 10, Issue 2, 2001, Pages 117-124

  Logothetidis, S ^a   Gioti, M ^a   Patsalas, P ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

Amorphous carbon; Ellipsometry; Modeling; Sputtering

Indexed keywords

ADSORPTION; CARBON NITRIDE; DEPOSITION; DIFFUSION IN SOLIDS; ELLIPSOMETRY; FILM GROWTH; MAGNETRON SPUTTERING; NUCLEATION; OPTICAL PROPERTIES;

MULTIWAVELENGTH ELLIPSOMETRY; SPECTROSCOPIC ELLIPSOMETRY;

AMORPHOUS FILMS;

SPUTTERING;

EID: 0035248136     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00457-X     Document Type: Article

References (22)