A piezoelectric unimorph deformable mirror concept by wafer transfer for ultra large space telescopes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4839, Issue 2, 2002, Pages 703-710

  Yang, Eui Hyeok ^a   Shcheglov, Kirill ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Adaptive Optics; Continuous mirror; Deformable mirror (DM); Microelectromechanical Systems (MEMS); Piezoelectric actuator; Segmented Space Telescope; Unimorph membrane; Wafer level membrane transfer

Indexed keywords

ACTUATORS; ERROR ANALYSIS; PIEZOELECTRIC MATERIALS; SILICON WAFERS; TECHNOLOGY TRANSFER; TELESCOPES;

ULTRA LARGE SPACE TELESCOPES;

MIRRORS;

EID: 0038737049     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.456992     Document Type: Conference Paper

References (11)

1. M. A. Ealey and J. F. Washeba, "Continuous Face Sheet Low Voltage Deformable Mirrors," Optical Eng., 29, p. 1191, Oct. 1990.
2. V. M. Bright et al., "Surface Micromachined Micro-Opto-Electro-Mechanical Systems," IEICE Trans. Electron, E80-C (2), pp. 206-213, Feb. 1997.
3. M. A. Michalicek et al., "Design and Simulation of Advanced Surface Micromachined Micromirror Devices for Telescope Adaptive Optics Applications," SPIE Conf. On Adaptive Optical System Technology, Kona, Hawaii, March 1998, pp. 805-815.
4. W. D. Cowan et al., "Evaluation of Microfabricated Deformable Mirror Systems," SPIE Conf. On Adaptive Optical System Technology, Kona, Hawaii, March 1998, pp. 790-804.
5. G. Vdovin, "Optimization-based Operation of Micromachined Deformable Mirrors," SPIE Conf. On Adaptive Optical System Technology, Kona, Hawaii, March 1998, pp. 902-909.
6. P. K. C. Wang, et al., "A Method for Designing Electrostatic-Actuator Electrode Pattern in Micromachined Deformable Mirrors," Sensors and Actuators A, 55, pp.211-217, 1996.
7. T. Bifano et al., "Continuous-Membrane Surface-Micromachined Silicon Deformable Mirror," Opt. Eng. 36 (5), p. 1354 May 1997.
8. J. Mansell et al., "Silicon Deformable Mirrors and CMOS-based Wavefront Sensors," SPIE International Conference, High-Resolution Wavefront Control, San Diego, USA, Aug., 2000, pp. 15-25.
9. E. H. Yang and Dean V. Wiberg, "A New Wafer-Level Membrane Transfer Technique for MEMS Deformable Mirrors," IEEE Micro Electro Mechanical Systems (MEMS) 2001 Conference, Switzerland, 2000, pp. 80-83.
10. L. P. Wang, K. Deng, L. Zou, R. Wolf, R. J. Davis, and S. Trolier-McKinstry, "Microelectromechanical Systems (MEMS) Accelerometers Using Lead Zirconate Titanate Thick Films," IEEE Electron Device Letters, 23 (4), pp. 182-184, 2002.
11. L. P. Wang, Ph.D. thesis, the Pennsylvania State University, 2001