Microelectromechanical systems (MEMS) accelerometers using lead zirconate titanate thick films

IEEE Electron Device Letters

Volumn 23, Issue 4, 2002, Pages 182-184

  Wang, L P ^a   Deng, K ^b   Zou, L ^b   Wolf, R ^a   Davis, R J ^a   Trolier McKinstry, S ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b Wilcoxon Research Inc   (United States)

Author keywords

Microelectromechanical devices; Micromachining; Piezoelectric films; Sensors

Indexed keywords

ACCELEROMETERS; MATHEMATICAL MODELS; PERMITTIVITY; PIEZOELECTRIC MATERIALS; PLATINUM; REACTIVE ION ETCHING; SEMICONDUCTING LEAD COMPOUNDS; SILICA; THERMODYNAMIC STABILITY; THICK FILMS; TITANIUM;

DEEP TRENCH REACTIVE ION ETCHING; LEAD ZIRCONATE TITANATE; LOW TRANSVERSE SENSITIVITY; PIEZOELECTRIC FILM;

MICROELECTROMECHANICAL DEVICES;

EID: 0036541732     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.992832     Document Type: Article

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