A method for designing electrostatic-actuator electrode pattern in micromachined deformable mirrors

Sensors and Actuators, A: Physical

Volumn 55, Issue 2-3, 1996, Pages 211-217

  Wang, P K C ^a   Gutierrez, R C ^b   Bartman, R K ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Deformable mirrors; Electrostatic actuators; Micromachining

Indexed keywords

DEFORMATION; ELECTRODES; ELECTROSTATIC DEVICES; MEMBRANES; MICROMACHINING; MIRRORS;

DEFORMABLE MIRRORS; ELECTROSTATIC ACTUATORS; MIRROR SURFACE DEFORMATION;

ACTUATORS;

EID: 0030182083     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80080-5     Document Type: Article

References (8)

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