Design and simulation of advanced surface micromachined micromirror devices for telescope adaptive optics applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3353, Issue , 1998, Pages 805-815

  Michalicek, M Adrian ^a   Clark, Natalie ^a   Comtois, John H ^a   Schriner, Heather K ^b  

^a AIR FORCE RESEARCH LABORATORY   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Adaptive optics; CMP planarization; MEMS; Micromirrors; MOEMS; Optical MEMS; Strehl ratio; SUMMiT

Indexed keywords

CHEMICAL MECHANICAL POLISHING; CHEMICAL POLISHING; FABRICATION; GEOMETRICAL OPTICS; MEMS; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; OPTICAL SYSTEMS; PHOTOLITHOGRAPHY; POLYSILICON; STANDARDIZATION; ABERRATIONS; ADAPTIVE OPTICS; COMPUTER SIMULATION; OPTICAL TELESCOPES;

CMP PLANARIZATION; MICROMIRRORS; MOEMS; OPTICAL MEMS; STREHL RATIO; SUMMIT; AXIAL ROTATION MICROMIRROR DEVICE; CHEMICAL MECHANICAL POLISHING; FLEXURE BEAM MICROMIRROR DEVICE; SURFACE CHARACTERIZATION;

ADAPTIVE OPTICS; MIRRORS;

EID: 0032276283     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.321697     Document Type: Conference Paper

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