A new wafer-level membrane transfer technique for MEMS deformable mirrors

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 80-83

  Yang, E H ^a   Wiberg, D V ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BONDING; MIRRORS; PHOTORESISTS; POLYMERIC MEMBRANES; SILICON ON INSULATOR TECHNOLOGY; SUBSTRATES;

DEFORMABLE MIRRORS;

SILICON WAFERS;

EID: 0035018042     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)