Surface acoustic wave channel waveguides by AlN films

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1996, Pages 289-292

  Giannelli, K ^a   Giovannini, L ^a   Verona, E ^a   Socino, G ^a  

^a CNR Consiglio Nazionale delle Ricerche   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC TRANSDUCERS; ALUMINUM COMPOUNDS; SEMICONDUCTING FILMS; SPUTTER DEPOSITION; SUBSTRATES; WAVEGUIDE COUPLERS;

ACOUSTIC COUPLER; SURFACE ACOUSTIC WAVE CHANNEL WAVEGUIDES;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0030373281     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)