Texture-control of lead zirconate titanate films for actuator applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4946, Issue , 2002, Pages 98-110

  Iijima, Takashi ^a   Ito, Sachiko ^a   Matsuda, Hirofumi ^a   Tani, Masanao ^b   Akamatsu, Masahiro ^b   Yasuda, Yoshiaki ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b STANLEY ELECTRIC CO LTD   (Japan)

Author keywords

Arc discharged reactive ion plating; Chemical solution deposition; Displacement property; Ferroelectric property; Micro actuator; PZT; Thin film

Indexed keywords

DEPOSITION; FERROELECTRIC THIN FILMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SEMICONDUCTING LEAD COMPOUNDS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; THICK FILMS;

ARC DISCHARGED REACTIVE ION PLATING; CHEMICAL SOLUTION DEPOSITION PROCESS; LEAD ZIRCONATE TITANATE FILMS; PIEZOELECTRIC MICRODEVICES;

MICROACTUATORS;

EID: 0038513943     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.468266     Document Type: Conference Paper

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