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Volumn 38, Issue 9 B, 1999, Pages 5524-5527
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Development of lead zirconate titanatc family thick films on various substrates
a a a a |
Author keywords
Actuator; Low temperature sintering; Micromachine; Piezoelectric ceramic; Screen printing; Thick film
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Indexed keywords
CERAMIC MATERIALS;
LEAD COMPOUNDS;
MICROACTUATORS;
PIEZOELECTRIC MATERIALS;
PIEZOELECTRIC TRANSDUCERS;
SCREEN PRINTING;
SILICON WAFERS;
SINTERING;
THICK FILMS;
VIBRATIONS (MECHANICAL);
LEAD ZIRCONATE TITANATE;
DIELECTRIC FILMS;
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EID: 0033321405
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.38.5524 Document Type: Article |
Times cited : (43)
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References (15)
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