Microstructure control in MOCVD PZT thin films

Materials Research Society Symposium - Proceedings

Volumn 433, Issue , 1996, Pages 213-224

  Kim, Daesig ^a   Kim, Tae Young ^a   Lee, June Key ^a   Tao, W ^a   Desu, Seshu B ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; CRYSTAL MICROSTRUCTURE; GRAIN SIZE AND SHAPE; LEAD COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; THERMAL EFFECTS; THIN FILMS; X RAY CRYSTALLOGRAPHY;

GRAIN ORIENTATION; MICROSTRUCTURE CONTROL;

FERROELECTRIC MATERIALS;

EID: 0030388430     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-433-213     Document Type: Conference Paper

References (9)