Arrays of monocrystalline silicon micromirrors fabricated using CMOS compatible transfer bonding

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 271-274

  Haasl, Sjoerd ^a   Niklaus, Frank ^a   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; CMOS INTEGRATED CIRCUITS; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRODES; PHOTOLITHOGRAPHY; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

LOW TEMPERATURE ADHESIVE WAFER BONDING; MEMBRANE TRANSFER BONDING; MICROMIRROR ARRAYS;

MIRRORS;

EID: 0038494554     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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