Electrostatically operated micromirrors for hadamard transform spectrometer

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 5, Issue 1, 1999, Pages 106-110

  Diehl, Torsten ^a   Ehrfeld, Wolfgang ^a   Lacher, Manfred ^a   Zetterer, Thomas ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

Hadamard transform spectrometer; Micromirrors; Polyimide; Sacrificial layer

Indexed keywords

ARRAYS; ELECTROSTATIC DEVICES; LIGHT REFLECTION; MASKS; MATHEMATICAL TRANSFORMATIONS; OPTICAL RESOLVING POWER; PHOTODETECTORS; SIGNAL TO NOISE RATIO; SPECTROMETERS;

HADAMARD TRANSFORM SPECTROMETERS; MICROMIRRORS;

MIRRORS;

EID: 0032654581     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.748112     Document Type: Article

References (13)

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