Crystalline oxides on silicon - alternative dielectrics for advanced transistor technologies

Materials Research Society Symposium - Proceedings

Volumn 567, Issue , 1999, Pages 415-425

  McKee, Rodney ^a   Walker, Fred ^a   Chisholm, Matt ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; ELECTRIC PROPERTIES; EPITAXIAL GROWTH; FERROELECTRICITY; INTERFACES (MATERIALS); MOS CAPACITORS; PERMITTIVITY; PHASE TRANSITIONS; PHYSICAL PROPERTIES; POLARIZATION; THERMODYNAMICS; TRANSISTORS;

CRYSTALLINE OXIDES; FERROELECTRIC POLARIZATION; HETEROEPITAXY; SILICON BASED TRANSISTOR TECHNOLOGY;

OXIDES;

EID: 0033355960     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-567-415     Document Type: Conference Paper

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