Radical densities in fluorocarbon/O 2 discharges - Interpretation based on a simple plasma chemistry model

Applied Surface Science

Volumn 211, Issue 1-4, 2003, Pages 285-292

  Kim, Min Tae ^a  

^a Korea Electric Power Research Institute (KEPRI)   (South Korea)

Author keywords

Fluorocarbon O 2 discharges; Plasma chemistry model; Radical densities

Indexed keywords

DENSITY (SPECIFIC GRAVITY); FREE RADICALS; MATHEMATICAL MODELS; OXYGEN; PLASMAS;

PLASMA CHEMISTRY;

FLUOROCARBONS;

EID: 0038333122     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00253-8     Document Type: Article

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