Patterning of magnetron sputtered SmCo thin films by excimer laser ablation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4936, Issue , 2002, Pages 177-185

  Wang, Yun H ^a   Ghantasala, Muralidhar K ^b   Sood, Dinesh K ^a   Harvey, Erol C ^b  

^a RMIT UNIVERSITY   (Australia)

^b SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

Author keywords

Excimer laser ablation; MEMS; Patterning; SmCo; Thin films

Indexed keywords

EXCIMER LASERS; LASER ABLATION; MAGNETRON SPUTTERING; MICROELECTROMECHANICAL DEVICES; SAMARIUM ALLOYS; SCANNING ELECTRON MICROSCOPY; SURFACE TOPOGRAPHY;

PATTERN MASK SIZE;

THIN FILMS;

EID: 0038327645     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.476351     Document Type: Conference Paper

References (23)

1. R. Srinivasan and V. Mayne-Banton, "Self-Developing Photoetching of Poly (ethylene terephthalate) Films by Far-Ultraviolet Excimer Laser Radiation," Appl. Phys. Lett., 41 (1982) 576-578.
2. 2 Lasers", Appl. Surf. Sci., 46 (1990) 430-434.
3. J. Kruger and W. Kautek, "Femtosecond Pulse Visible Laser Processing of Transparent Materials", Appl. Surf. Sci., 96-98 (1996) 430-438.
4. J. Ihlemann, A. Scholl, H. Schmidt and B. Wolff-Rottke, "Nanosecond and Femtosecond Excimer Laser Ablation of Oxide Ceramics", Appl. Phys. A, 60 (1995) 411-417.
5. A. C. Tam, J. L. Brand, D. C. Cheng and W. Zapka, "Picosecond Laser Sputtering of Sapphire at 266 nm", Appl. Phys. Lett., 55 (1989) 2045-2047.
6. M. Eyett and D. Bauerle, "Influence of the Beam Spot Size on Ablation Rates in Pulsed Laser Processing", Appl. Phys. Lett., 51 (1987) 2054-2055.
7. L. Dirnberger, P. E. Dyer, S. Farrar, P. H. Key and P. Monk, "Laser Ablation Studies of Magnesium Oxide", Appl. Surf. Sci., 69 (1993) 216-220.
8. T. A. Znotins, D. Poulin, and J. Reid, "Excimer Lasers: An Emerging Technology in Materials Processing", Laser Focus/Electro-Optics (May 1987) 54-70.
9. U. Rebhan, H. Endert, and G. Zaal, "Micromanufacturing Benefits from Excimer Laser Development", Laser Focus World (November 1994) 91-96.
10. 3 for Realisation of Optimised Optical Modulator Electrode Structures", Proc SPIE, Vol. 4557, 119-128, 2001.
11. S. T. Davies, E. C. Harvey, H. Jin, J. P. Hayes and M. K. Ghantasala, "Micromachining of TiNi Shape Memory Alloy by Excimer Laser Ablation", Proc. SPIE, Vol. 4592, 2001.
12. A. J. Dowling, M. K. Ghantasala, J. P. Hayes, E. C. Harvey, and E. D. Doyle, "Excimer Laser Patterning of TiN Film from Metal Sacrificial Layers", Proc. SPIE, Vol. 4592, 481-488, 2001.
13. E. Matthias, M. Reichling, J. Siegel, O. W. Kading, S. Petzoldt, H. Skurk, P. Bizenberger, and E. Neske, "The Influence of Thermal Diffusion on Laser Ablation of Metal Films", Appl. Phys. A, 58 (1994) 129-136.
14. A. Rosenfeld, E. E. B. Campbell, "Picosecond UV-Laser Ablation of Au and Ni Films", Appl. Surf. Sci., 96-98 (1996) 439-442.
15. D. W. Doerr and D. R. Alexander, "Sub-micron Patterning of Aluminium Films by Laser Ablation", Proc. SPIE, Vol. 3874, 62-67, 1998.
16. W. Spiess and H. Strack, "Via Hole Filling with Gold Melting by Kr Excimer Laser Irradiation", J. Vac. Sci. Technol. B, 7 (1989) 127-128.
17. M. K. Ghantasala, J. P. Hayes, E. C. Harvey, and D. K. Sood, "Patterning, Electroplating and Removal of SU-8 Moulds by Excimer Laser Micromachining", J. Micromech. Microeng., 11 (2001) 133-139.
18. A. J. Dowling, M. K. Ghantasala, J. P. Hayes, E. C. Harvey, E. D. Doyle, and H. Brinkies, "Excimer Laser Micromachining of TiN Films from Chromium and Copper Sacrificial Layers", Smart Mater. Struct., 11 (2002) 715-721.
19. I. Miyamoto and H. Hayashi, "Laser Machining of Thin Metal Film", in: Abstracts of ICALEO'95, San Diego, CA, 13-16 October 1995; Laser Institute of America, Orlando, FL, USA, 391-400.
20. V. P. Veiko, S. M. Metev, A. I. Kaidanov, M. N. Libenson, and E. B. Jakovlev, "Two-phase Mmechanism of Laser Induced Removal of Thin Absorbing Films: I. Theory", J. Phys. D. App. Phys., 13 (1980) 1565-1570.
21. X. Zhang, S. S. Chu, J. R. Ho, and C. P. Grigoropoulos, "Excimer Laser Ablation of Thin Gold Films on a Quartz Crystal Microbalance at Various Argon Background Pressures", Appl. Phys. A, 64 (1997) 545-552.
22. W. Kautek and J. Krüger, "Femtosecond Pulse Visible Laser Processing of Transparent Materials", Appl. Surf. Sci., 96-98 (1996) 430-438.
23. A. K. Jain, V. N. Kulkarni and D.K.Sood, "Pulsed Laser Heating Calculations Incorporating Vapourization", Applied Physics, 25 (1981) 127-133.