Micromachining of TiNi shape memory alloy by excimer laser ablation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4592, Issue , 2001, Pages 88-95

  Davies, S T ^a   Harvey, E C ^b   Jin, H ^b   Hayes, J P ^b   Ghantasala, M K ^b  

^a UNIVERSITY OF WARWICK   (United Kingdom)

^b SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

Author keywords

Excimer laser ablation; Micromachining; Shape memory alloy; TiNi

Indexed keywords

EXCIMER LASERS; LASER ABLATION; LASER DAMAGE; LENSES; PHOTOLITHOGRAPHY; PROJECTION SYSTEMS; SHAPE MEMORY EFFECT; TITANIUM ALLOYS;

MICROPOSITIONERS;

MICROMACHINING;

EID: 0035768522     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.449012     Document Type: Article

References (18)

1. P. Krulevitch, A.P. Lee, P.B. Ramsey, J.C. Trevino, J. Hamilton and M.A. Northrup, "Thin film shape memory alloy microacmators", J. Microelectromechanical Systems, 5, 270-282 (1996).
2. Y. Suzuki, "Fabrication of shape memory alloys" in Shape Memory Materials, K. Otsuka and C.M. Wayman (eds), pp 133-148, Cambridge University Press, Cambridge, 1998.
3. M. Kohl, K.D. Skrobanek, C. Goh and D.M. Allen, "Mechanical characterisation of shape memory micromaterials", Proc. SPIE Vol.2880, 108-118 (1996).
4. J.J. Gill, D.T. Chang, L.A. Momoda and G.P. Carman, "Manufacturing issues of thin film NiTi microwrapper", Sensors and Actuators, A93, 148-156 (2001).
5. H. Haferkamp, S. Paschko and M. Goede, "New laser machining processes for shape memory alloys", Proc SPIE 4234, 94-101 (2001).
6. C.M. Jackson, H.J. Wagner and R.J. Wasilewski, "55-Nitinol - the alloy with a memory: Its physical metallurgy, properties, and applications", NASA Report SP 5110 (1972).
7. A.D. Johnson, "Vacuum-deposited TiNi shape memory film: characterization and applications in microdevices", J.Micromech. Microeng., 1, 34-41 (1991).
8. K. Tsuchiya and S.T. Davies, "Fabrication of TiNi shape memory alloy microacmators by ion beam sputter deposition", Nanotechnology, 9, 67-71 (1998).
9. S.T. Davies and K. Tsuchiya, "Growth and characterisation of shape memory alloy thin films for micropositioning and microactuation", Proc. SPIE 3511, 174-182 (1998).
10. M. Kohl, D. Dittman, E. Quandt, B. Winzek, "Thin film shape memory microvalves with adjustable operation temperature", Sensors and Actuators, 83, 214-219 (2000).
11. E. Makino, T. Mitsuya and T. Shibata, "Micromachining of TiNi shape memory thin film for fabrication of micropump", Sensors and Actuators, 79, 251-259 (2000).
12. S. Takeuchi and I. Shimoyama, "A three-dimensional shape memory alloy microelectrode with clipping structure for insect neural recording", J. Microelectromechanical Systems, 9, 24-31 (2000).
13. R. Srinivasan, "Ablation of polymers and biological tissue by ultraviolet lasers", Science, 234, 559-565 (1986).
14. R. Srinivasan and B. Braren, "Ultraviolet laser ablation of organic polymers", Chem. Rev., 89, 1303-1316 (1989).
15. C.P. Cristensen, "Micromachining of diamond substrates with wavegnide excimer lasers", Proc. SPIE 2062, Lasers as tools for manufacturing, 14-21 (1994).
16. P.H. Key, P.E. Dyer and R.D. Greenough, "Excimer laser patterning and etching of metals", In 'Emerging technologies for in situ processing', D.J. Ehrlich and V.T. Nguyen (eds), Martinus Nijhoff, 105-112 (1988).
17. E. Hunger, H. Pietsch, S. Petzoldt and E. Matthias, "Multishot laser ablation of polymer and metal films at 248 nm", Appl. Surf. Sci., 54, 227-231 (1992).
18. Institut d'Electronique et de Microelectronique du Nord, F-59652 Villeneuve d'Ascq, Cedex -France.