Excimer laser surface micromachining of LiNbO3 for realization of optimised optical modulator electrode structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4557, Issue , 2001, Pages 119-128

  Chong, Han Woo ^a   Mitchell, Arnan ^a   Hayes, Jason P ^b   Austin, Michael W ^a,b  

^a RMIT UNIVERSITY   (Australia)

^b SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

Author keywords

Ablation; Excimer laser; Lithium niobate; Optical modulators; Surface machining

Indexed keywords

ELECTRODES; EXCIMER LASERS; INTEGRATED OPTICS; LASER ABLATION; LIGHT MODULATORS; LITHIUM NIOBATE;

SURFACE MACHINING;

MICROMACHINING;

EID: 0035768015     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.442934     Document Type: Article

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