Sub-micron patterning of aluminum films by laser ablation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3874, Issue , 1999, Pages 62-67

  Doerr, David W ^a   Alexander, Dennis R ^a  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ATOMIC FORCE MICROSCOPY; FUSED SILICA; LASER PULSES; NANOTECHNOLOGY; THICK FILMS; ULTRAFAST PHENOMENA;

FILM ABLATION; LASER FABRICATION; MICROFABRICATION; SUBMICRON PATTERNING;

LASER ABLATION;

EID: 0033352314     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)