Excimer laser patterning of TiN film from metal sacrificial layers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4592, Issue , 2001, Pages 481-488

  Dowling, A ^a   Ghantasala, M ^a   Hayes, J ^a   Harvey, E ^a   Doyle, D ^a  

^a SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

Author keywords

Excimer laser; Laser ablation; Sacrificial layer; Thin film; TiN; Titanium Nitride

Indexed keywords

DELAMINATION; ELECTRODEPOSITION; ETCHING; EXCIMER LASERS; LASER ABLATION; SEMICONDUCTING SILICON; SPUTTERING; THIN FILMS; TITANIUM NITRIDE;

FILTERED ARC DEPOSITION (FAD);

MICROELECTRONICS;

EID: 0035772503     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.449005     Document Type: Article

References (11)

1. J. Baumann, T. Werner, A. Ehrlich, M. Rennau, Ch. Kaufmann, and T. Gessner. "TIN diffusion barriers for copper metallization". Microelectronic Engineering 37-38, pp.221-228. 1997.
2. S.K. Rha, W.J. Lee, S.Y. Lee, D.W. Kim, C.O. Park, and S.S. Chun. "Interdiffusions and reactions in Cu/TiN/Ti/Si and Cu/TiN/Ti/SiO[sb 2]/Si multilayer structures". Journal of Materials Research 12[12], pp.3367-3372. 1997.
3. T. Matsue, T. Hanabusa, and Y. Ikeuchi. "Residual stress and its thermal relaxation in TiN films". Thin Solid Films v281-282[n1-2], pp.344-347. 1996.
4. S. Johansson, F. Ericson, and J.A. Schweitz. "Influence of surface coatings on elasticity, residual stresses, and fracture properties of silicon microelements". Journal of Applied Physics 65[1], pp.122-128. 1988.
5. A. Karimi, O.R. Shojaei, and J.L. Martin. "Mechanical testing and microstructural characterization of TiN thin films". Materials Research Society Symposium Proceedings: Proceedings of the 1997 MRS Fall Meeting. pp.617-622. 1998. Warrendale, PA, USA, MRS.
6. M. Mehregany and Y.-C. Tai. "Surface micromachined mechanisms and micromotors". Journal of Micromechanics and Microengineering 1[2], pp.73-85. 1991.
7. P.J. French and P.M. Sarro. "Surface versus bulk micromachining: the contest for suitable applications". Journal of Micromechanics and Microengineering 8[2], pp.45-53. 1998.
8. S.V. Fortuna, Y.P. Sharkeev, A.J. Perry, J.N. Matossian, and I.A. Shulepov. "Microstructural features of wear-resistant titanium nitride coatings deposited by different methods". Thin Solid Films v377-378, pp.512-517. 2000.
9. P.J. Martin, A. Bendavid, R.P. Netterfield, T.J. Kinder, F. Jahan, and G. Smith. "Plasma deposition of tribological and optical thin film materials with a filtered cathodic arc source". Surface and Coatings Technology 112[1], pp.257-260. 1999.
10. V.J. Zaleckas and J.C. Koo. "Thin film machining by laser-induced explosion". Applied Physics Letters 31(9). Pp.615-617. 1977.
11. X. Zhang, S.S. Chu, J.R. Ho, and C.P. Grigoropoulos. "Excimer laser ablation of thin gold films on a quartz crystal microbalance at various argon background pressures". Applied Physics A: Materials Science & Processing 64[6], pp.545-552. 1997.