SCOPUS 정보 검색 플랫폼

Volumn 12, Issue 3-7, 2003, Pages 757-761

Fabrication of diamond dies for microforming

Author keywords

Diamond film; Hot filament chemical vapor deposition (CVD); Microelectromechanical systems (MEMS); Nanoparticles

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COATING TECHNIQUES; DIES; MICROFORMS; NANOSTRUCTURED MATERIALS; POLYMETHYL METHACRYLATES; SURFACE ROUGHNESS;

MICRODIES;

DIAMOND FILMS;

DIAMOND;

EID: 0038184110 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(02)00230-3 Document Type: Article

Times cited : (8)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.