Infrared attenuated-total-reflection spectroscopy of microcrystalline silicon growth

Journal of Non-Crystalline Solids

Volumn 266-269 A, Issue , 2000, Pages 54-58

  Okazaki, Yoshirou ^a   Miyazaki, Seiichi ^a   Hirose, Masataka ^a  

^a HIROSHIMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003103559     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0022-3093(99)00726-7     Document Type: Article

References (15)

1. K. Tanaka, Mater. Res. Soc. Symp. Proc. 452 (1997) 3.
2. G. Gangly, M. Fukawa, T. Ikeda, A. Matsuda 227-230 (1998) 1069.
3. J. Meier, T. Torres, T. Platz, S. Dubail, U. Kroll, J.A. Anna Selvan, N. Pellaton Vacher, C. Hof, D. Fischer, H. Keppner, A. Shah, K.-D. Ufert, P. Gianooules, J. Koehler, Mater. Res. Soc. Symp. Proc. 420 (1996) 3.
4. H. Stiebig, D. Knipp, P. Haoke, F. Finger, J. Non-Cryst. Solids 227-230 (1998) 1330.
5. H.V. Nguyen, I. An, Y. Li, C.R. Wronski, R.W. Collins, Mater. Res. Soc. Symp. Proc. 258 (1992) 235.
6. H. Shirai, B. Drevillon, I. Shimizu, Jpn. J. Appl. Phys. 33 (1994) 5590.
7. S. Hamma, P. Roca i Cabarrocas, J. Non-Cryst. Solids 227-230 (1998) 852.
8. S. Miyazaki, H. Shin, Y. Miyoshi, M. Hirose, Jpn. J. Appl. Phys. 34 (1995) 787.
9. Y. Miyoshi, Y. Yoshida, Y. Miyazaki, M. Hirose, J. Non-Cryst. Solids 198-200 (1996) 1029.
10. J.E. Smith Jr, M.H. Brodsky, B.L. Crowder, M.I. Nathan, A. Pinczuk, Phys. Rev. Lett. 26 (1971) 642.
11. W. Beyer, H. Wagner, J. Non-Cryst. Solids 59&60 (1983) 161.
12. A. Mastuda, J. Non-Cryst. Solids 59&60 (1983) 767.
13. Y.J. Chabal, G.S. Higashi, K. Raghavachari, V.A. Burrrows, J. Vac. Sci. Technol. A 7 (1989) 2104.
14. W.B. Pollard, G. Lucobsky, Phys. Rev. B 26 (1982) 3172.
15. V.A. Burrows, Y.J. Chabal, G.S. Higashi, K. Raghavachari, S.B. Christman, Appl. Phys. Lett. 53 (1988) 998.