Effects of presheath dynamics on radio-frequency sheaths

Journal of Applied Physics

Volumn 93, Issue 9, 2003, Pages 5034-5042

  Xiang, N ^a   Waelbroeck, F L ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; IONIZATION; NUMERICAL METHODS; PLASMAS;

RADIO-FREQUENCY SHEATHS;

PLASMA SHEATHS;

EID: 0037986725     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1563823     Document Type: Article

References (31)

1. N. Hershkowitz, IEEE Trans. Plasma Sci. 26, 1610 (1998).
2. E. Kawamura, V. Vahedi, M. A. Lieberman, and C. K. Birdsall, Plasma Sources Sci. Technol. 8, R45 (1999).
3. M. A. Lieberman, IEEE Trans. Plasma Sci. 16, 638 (1988).
4. V. A. Godyak and N. Sternberg, Phys. Rev. 42, 2299 (1990).
5. K.-U. Riemann, J. Appl. Phys. 65, 999 (1989).
6. M. Klick, J. Appl. Phys. 79, 3445 (1996).
7. J. Gierling and K.-U. Riemann, J. Appl. Phys. 83, 3521 (1998).
8. A. Metze, D. W. Ernie, and H. J. Oskam, J. Appl. Phys. 60, 3081 (1986).
9. F. L. Waelbroeck, Phys. Rev. E 65, 066407 (2002).
10. P. A. Miller and M. E. Riley, J. Appl. Phys. 82, 3689 (1997).
11. T. Panagopoulos and D. J. Economou, J. Appl. Phys. 85, 3435 (1999).
12. D. Bose, T. R. Govindan, and M. Meyyappan, J. Appl. Phys. 87, 7176 (2000).
13. D. Bose, T. R. Govindan, and M. Meyyappan, J. Appl. Phys. 89, 5932 (2001).
14. E. A. Edelberg and E. S. Aydil, J. Appl. Phys. 86, 4799 (1999).
15. M. A. Sobolewski, Phys. Rev. E 62, 8540 (2000).
16. Z.-L. Dai, Y.-N. Wang, and T.-C. Ma, Phys. Rev. E 65, 036403 (2002).
17. S. K. Kanakasabapathy and L. J. Overzet, Plasma Sources Sci. Technol. 7, 289 (1998).
18. K.-U. Riemann, Phys. Plasmas 4, 4158 (1997).
19. K.-U. Riemann, Phys. Fluids B 4, 2693 (1992).
20. N. Sternberg and V. A. Godyak, J. Phys. D 97, 4981 (1996).
21. M. S. Benilov, IEEE Trans. Plasma Sci. 28, 2207 (2000).
22. K.-U. Riemann, J. Tech. Phys. 41, 89 (2000).
23. T. E. Nitschke and D. B. Graves, IEEE Trans. Plasma Sci. 23, 717 (1995).
24. M. Goswami and H. Ramachandran, Phys. Plasmas 6, 4522 (1999).
25. R. N. Franklin and J. Snell, Phys. Plasmas 7, 3077 (2000).
26. R. N. Franklin and J. Snell, Phys. Plasmas 8, 643 (2001).
27. R. N. Franklin and J. R. Ockendon, J. Plasma Phys. 4, 371 (1970).
28. T. E. Nitschke and D. B. Graves, J. Appl. Phys. 76, 5646 (1994).
29. M. S. Barnes, T. J. Colter, and M. E. Elta, J. Appl. Phys. 61, 81 (1987).
30. E. P. Hammond, K. Mahesh, and P. Morin, J. Comput. Phys. 176, 402 (2002).
31. M. A. Sobolewski, Phys. Rev. E 59, 1059 (1999).