Semianalytical ion current model for radio-frequency driven collisionless sheaths

Journal of Applied Physics

Volumn 89, Issue 11 I, 2001, Pages 5932-5938

  Bose, Deepak ^a   Govindan, T R ^a   Meyyappan, M ^a  

^a NASA AMES RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035356154     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1365436     Document Type: Article

References (11)

1. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley. New York, 1994).
2. M. J. Grapperhaus and M. J. Kushner. J. Appl. Phys. 81, 569 (1997).
3. S. Rauf and M. J. Kushner, J. Appl. Phys. 83, 5087 (1998).
4. M. A. Lieberman, IEEE Trans. Plasma Sci. 16, 638 (1988).
5. V. A. Godyak and N. Sternberg, Phys. Rev. A 42, 2299 (1990).
6. A. Metze, D. W. Ernie, and H. J. Oskam, J. Appl. Phys. 60, 3081 (1986).
7. M. E. Riley, Sandia National Laboratories Technical Report No. SAND95-0775 UC-401 (May 1995).
8. P. A. Miller and M. E. Riley, J. Appl. Phys. 82, 3689 (1997).
9. D. Bose, T. R. Govindan, and M. Meyyappan, J. Appl. Phys. 87, 7176 (2000).
10. K. U. Riemann, Phys. Fluids B 4, 2693 (1992).
11. J. Gierling and K. U. Riemann, J. Appl. Phys. 83, 3521 (1998).