Structure of titanium films implanted with carbon by plasma-based ion implantation

Surface and Coatings Technology

Volumn 169-170, Issue , 2003, Pages 375-378

  Ma, Xinxin ^a   Sun, Yue ^a   Wu, Peilian ^a   Xia, Lifang ^a   Yukimura, Ken ^b  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b DOSHISHA UNIVERSITY   (Japan)

Author keywords

Plasma based ion implantation; Structures; Titanium carbide

Indexed keywords

CARBON; DEPOSITION; ION IMPLANTATION; MAGNETRON SPUTTERING; PLASMAS; STEEL; TITANIUM COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

PERIODICAL DISTRIBUTION;

METALLIC FILMS;

COATING; ION IMPLANTATION; PLASMA TREATMENT; SURFACE TREATMENT; TITANIUM;

EID: 0037792931     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00047-1     Document Type: Article

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