Industrial applications of plasma immersion ion implantation

Surface and Coatings Technology

Volumn 93, Issue 2-3, 1997, Pages 274-279

  Blawert, C ^a   Mordike, B L ^a  

^a CLAUSTHAL UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Coatings; Ion implantation; Nitriding; Plasma immersion ion implantation; Surface treatment; Thermal diffusion

Indexed keywords

COATINGS; DEPOSITION; INDUSTRIAL APPLICATIONS; INDUSTRIAL ECONOMICS; ION BEAMS; ION BOMBARDMENT; NITRIDING; PLASMA APPLICATIONS; SURFACE TREATMENT; THERMAL DIFFUSION;

ION BEAM ENHANCED DEPOSITION (IBED); PLASMA IMMERSION ION IMPLANTATION (PIII);

ION IMPLANTATION;

EID: 0031223735     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00060-1     Document Type: Article

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