Vacuum arc metal plasma production and the transition of processing mode from metal ion beam to dc metal plasma immersion

Surface and Coatings Technology

Volumn 136, Issue 1-3, 2001, Pages 16-22

  Brown, I G ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRIC POTENTIAL; ION IMPLANTATION; ION SOURCES; VACUUM TECHNOLOGY;

PLASMA SOURCE ION IMPLANTATION (PSII); VACUUM ARC METAL PLASMAS;

PLASMA SOURCES;

EID: 0035254763     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)01002-1     Document Type: Article

References (31)

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2. See the Special Issues on Vacuum Discharge Plasmas in IEEE Trans. Plasma Sci., usually in the October issues in odd-numbered years; e.g. IEEE Trans. Plasma Sci. 21 (1993) 397-608; 23 (1995) 877-1025; 25 (1997) 519-762; 27 (1999) 815-1100.
3. See the Special Issues on Vacuum Discharge Plasmas in IEEE Trans. Plasma Sci., usually in the October issues in odd-numbered years; e.g. IEEE Trans. Plasma Sci. 21 (1993) 397-608; 23 (1995) 877-1025; 25 (1997) 519-762; 27 (1999) 815-1100.
4. See the Special Issues on Vacuum Discharge Plasmas in IEEE Trans. Plasma Sci., usually in the October issues in odd-numbered years; e.g. IEEE Trans. Plasma Sci. 21 (1993) 397-608; 23 (1995) 877-1025; 25 (1997) 519-762; 27 (1999) 815-1100.
5. See the Special Issues on Vacuum Discharge Plasmas in IEEE Trans. Plasma Sci., usually in the October issues in odd-numbered years; e.g. IEEE Trans. Plasma Sci. 21 (1993) 397-608; 23 (1995) 877-1025; 25 (1997) 519-762; 27 (1999) 815-1100.
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10. See the Proceedings of the International Workshops on Plasma-Based Ion Implantation: J. Vac. Sci. Technol. B 12 (1994) 815-998; Surf. Coat. Technol. 85 (1996) 1-124; Surf. Coat. Technol. 93 (1997) 158-350; J. Vac. Sci. Technol. B 17 (1999) 798-899.
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