Development of an energetic ion assisted mixing and deposition process for TiNx and diamondlike carbon films, using a co-axial geometry in plasma source ion implantation

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 6, 1997, Pages 2875-2879

  Malik, Shamim M ^a   Fetherston, R P ^a   Conrad, J R ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031506701     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580842     Document Type: Article

References (8)

1. J. R. Conrad, U.S. Patent No. 4 764 394 (16 August 1988).
2. S. M. Malik, K. Sridharan, R. P. Fetherston, A. Chen, and J. R. Conrad, J. Vac. Sci. Technol. B 12, 843 (1994).
3. S. M. Malik, J. T. Scheuer, and J. R. Conrad, J. Appl. Phys. 69, 2904 (1991).
4. J. R. Conrad, R. A. Dodd, S. Han, M. Madapura, J. Scheuer, and K. Sridharan, J. Vac. Sci. Technol. A 3146, (1990).
5. J. R. Conrad, A. Chen, R. A. Dodd, J. T. Scheuer, K. Sridharan, and F. J. Worzala, Surface Modification of Materials by Plasma Source Ion Implantation, Proc. ASM-TMS, New Orleans, LA, Feb. 1991, Plasma and Laser Processing of Materials, edited by Upadhya, pp. 141-149.
6. K. C. Walter, R. P. Fetherston, K. Sridharan, A. Chen, M. M. Shamim, and J. R. Conrad, Mater. Res. Bull. 29, 827 (1994).
7. J. Chen, L. Xie, J. R. Conrad, and R. A. Dodd, J. Mater. Eng. Performance 2, 839 (1993).
8. L. Xie, F. J. Worzala, J. R. Conrad, and R. A. Dodd, Materials Week '92 Chicago, IL. 2-5 November 1992.