SCOPUS 정보 검색 플랫폼

Volumn 44, Issue 3, 2000, Pages 170-174

Preparation of Ti/N and Ag/TiNx multilayers by plasma based ion implantation with multi-targets unbalanced magnetron sputtering

(6) Ma, Xinxin a Li, Xiaodong a Sun, Yue a Xia, Lifang a Sun, Mingren a Li, Guang a

a HARBIN INSTITUTE OF TECHNOLOGY (China)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; ION IMPLANTATION; MAGNETRON SPUTTERING; NITROGEN; PLASMA APPLICATIONS; SILVER; THIN FILMS; TITANIUM; X RAY PHOTOELECTRON SPECTROSCOPY;

MULTI TARGETS; PLASMA BASED ION IMPLANTATION; UNBALANCED MAGNETRON SPUTTERING;

MULTILAYERS;

EID: 0033686378 PISSN: 0167577X EISSN: None Source Type: Journal
DOI: 10.1016/S0167-577X(00)00021-5 Document Type: Article

Times cited : (6)

References (15)

1
- 0031251202
- Bouzakis K.D., Vidakis N., Leyendecker T., Erkens G., Wenke R. Thin Solid Films. 308-309:1997;315.
- (1997) Thin Solid Films , vol.308-309 , pp. 315
- Bouzakis, K.D.¹ Vidakis, N.² Leyendecker, T.³ Erkens, G.⁴ Wenke, R.⁵

2
- 0030123750
- Labdi S., Houdy P., Psyllaki P., Jeandin M. Thin Solid Films. 275:1996;213.
- (1996) Thin Solid Films , vol.275 , pp. 213
- Labdi, S.¹ Houdy, P.² Psyllaki, P.³ Jeandin, M.⁴

3
- 84995723409
- Coeur F.L., Lagarde T., Pelletier J., Arnal Y., Buke R. Rev. Sci. Instrum. 69:1998;831.
- (1998) Rev. Sci. Instrum. , vol.69 , pp. 831
- Coeur, F.L.¹ Lagarde, T.² Pelletier, J.³ Arnal, Y.⁴ Buke, R.⁵

4
- 0032068182
- Brückner J., Günzel R., Richter E., Möller W. Surf. Coat. Technol. 103-104:1997;227.
- (1997) Surf. Coat. Technol. , vol.103-104 , pp. 227
- Brückner, J.¹ Günzel, R.² Richter, E.³ Möller, W.⁴

5
- 0032066819
- Yukimura K., Ohno K., Koto M., Kurooka S., Suzuki Y., Kinomura A., Chayahara A., Horino Y. Surf. Coat. Technol. 103-104:1997;252.
- (1997) Surf. Coat. Technol. , vol.103-104 , pp. 252
- Yukimura, K.¹ Ohno, K.² Koto, M.³ Kurooka, S.⁴ Suzuki, Y.⁵ Kinomura, A.⁶ Chayahara, A.⁷ Horino, Y.⁸

6
- 0031223620
- Anders A. Surf. Coat. Technol. 93:1997;158.
- (1997) Surf. Coat. Technol. , vol.93 , pp. 158
- Anders, A.¹

7
- 0032068714
- Volz K., Ensinger W., Stritzker B., Rauschenbach B. Surf. Coat. Technol. 103-104:1997;257.
- (1997) Surf. Coat. Technol. , vol.103-104 , pp. 257
- Volz, K.¹ Ensinger, W.² Stritzker, B.³ Rauschenbach, B.⁴

8
- 0026244446
- Münz W.D. Surf. Coat. Technol. 48:1991;81.
- (1991) Surf. Coat. Technol. , vol.48 , pp. 81
- Münz, W.D.¹

9
- 0031224190
- Ensinger W., Klein J., Usedom P., Rauschenbach B. Surf. Coat. Technol. 93:1997;175.
- (1997) Surf. Coat. Technol. , vol.93 , pp. 175
- Ensinger, W.¹ Klein, J.² Usedom, P.³ Rauschenbach, B.⁴

10
- 0031223222
- Schoser S., Forget J., Kohlhof Surf. Coat. Technol. 93:1997;339.
- (1997) Surf. Coat. Technol. , vol.93 , pp. 339
- Schoser, S.¹ Forget, J.² Kohlhof³

11
- 0002231170
- Z. Chen, Y. Wu, & Z. Shao. Beijing, China: China Machine Press
- Xia L., Ma X., Sun M., Sun Y., Zhan Z., Ji H. Chen Z., Wu Y., Shao Z. Proceedings of The Asian Conference on Heat Treatment of Materials. 1998;91 China Machine Press, Beijing, China.
- (1998) Proceedings of the Asian Conference on Heat Treatment of Materials , pp. 91
- Xia, L.¹ Ma, X.² Sun, M.³ Sun, Y.⁴ Zhan, Z.⁵ Ji, H.⁶

12
- 0342756088
- Master Thesis, Harbin Institute of Technology, Harbin
- R. Che, Master Thesis, Harbin Institute of Technology, Harbin, 1997.
- (1997)
- Che, R.¹

13
- 0031225190
- Meassick S., Champaign H. Surf. Coat. Technol. 93:1997;292.
- (1997) Surf. Coat. Technol. , vol.93 , pp. 292
- Meassick, S.¹ Champaign, H.²

14
- 0031222280
- Sarkissian A.H., Cliché L., Pardis E., Leblanc J.B. Surf. Coat. Technol. 93:1997;314.
- (1997) Surf. Coat. Technol. , vol.93 , pp. 314
- Sarkissian, A.H.¹ Cliché, L.² Pardis, E.³ Leblanc, J.B.⁴

15
- 0031225202
- Uglov V.V.V., Khodasevich V.V., Rusalsky D.P., Koeniger A., Hammerl K., Rauschenbach D. Surf. Coat. Technol. 93:1997;331.
- (1997) Surf. Coat. Technol. , vol.93 , pp. 331
- Uglov, V.V.V.¹ Khodasevich, V.V.² Rusalsky, D.P.³ Koeniger, A.⁴ Hammerl, K.⁵ Rauschenbach, D.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.